James W. Thackeray
96Patents
21h-index
69Co-inventors
91Inventor score
Filing activity: Feb 2, 1983 → Feb 24, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4921778A | Photoresist pattern fabrication employing chemically amplified metalized material | Physics | 86 | Expired |
| US5128232A | Photoresist composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units | Emerging Cross-Sectional Technologies | 58 | Expired |
| US5108875A | Photoresist pattern fabrication employing chemically amplified metalized material | Physics | 57 | Expired |
| US5851730A | Substrates coated with an antihalation layer that contains a resin binder comprising anthracene units | Physics | 49 | Expired |
| US6042997A | Copolymers and photoresist compositions comprising copolymer resin binder component | Physics | 48 | Expired |
| US5851738A | Method comprising substrates coated with an antihalation layer that contains a resin binder comprising anthracene units | Physics | 46 | Expired |
| US5861231A | Copolymers and photoresist compositions comprising copolymer resin binder component | Physics | 41 | Expired |
| US6528235B2 | Antihalation compositions | Physics | 40 | Expired |
| US7585612B2 | Coating compositions for use with an overcoated photoresist | Physics | 39 | Active |
| US5258257A | Radiation sensitive compositions comprising polymer having acid labile groups | Emerging Cross-Sectional Technologies | 37 | Expired |
| US7919222B2 | Coating compositions for use with an overcoated photoresist | Physics | 36 | Active |
| US6165697A | Antihalation compositions | Physics | 34 | Expired |
| US6048672A | Photoresist compositions and methods and articles of manufacture comprising same | Physics | 33 | Expired |
| US5500127A | Purification process | Performing Operations; Transporting | 30 | Expired |
| US5879856A | Chemically amplified positive photoresists | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6472128B2 | Antihalation compositions | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6200728A | Photoresist compositions comprising blends of photoacid generators | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6451503B1 | Antihalation compositions | Physics | 27 | Expired |
| US5968712A | Radiation sensitive compositions and methods | Physics | 27 | Expired |
| US5362600A | Radiation sensitive compositions comprising polymer having acid labile groups | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6800422B2 | Thick film photoresists and methods for use thereof | Physics | 22 | Expired |
| US6773864B1 | Antihalation compositions | Physics | 19 | Expired |
| US7632630B2 | Dyed photoresists and methods and articles of manufacture comprising same | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6037107A | Photoresist compositions | Physics | 16 | Expired |
| US5210000A | Photoresist and method for forming a relief image utilizing composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units | Emerging Cross-Sectional Technologies | 16 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.