Apparatus for transporting substrates

US5133285A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Peter Mahler · Obertshausen, DE
• Herbert Naehring · Rodenbach, DE

Key dates

• Filing date: Jan 16, 1991
• Grant date: Jul 28, 1992
• Expiry date: Jan 16, 2011

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05K13/0061
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

Apparatus for transporting substrates 22, 23 in vacuum deposition systems with several stations, comprising plate-like substrate holders 16 which are moved across the stations in a vertical position along a given path and have two rails which interact with two rows of rollers provided underneath the substrate holders. The side of the first rail 13 facing away from the substrate holder 16 has a longitudinal groove 13a which interacts with rollers 7, 7', 7", . . . which are rotatably disposed at the frame 4 of the apparatus and disposed in a first row where they are spaced apart. The second rail 14 runs parallel to the first one and has a planar bearing surface 14a the plane E.sub.2 of which intersects the rotating axes V.sub.a of the first row at a right angle and approximately traverses the center of gravity S of the substrate holder 16. The bearing surface 14a interacts with S rollers 8, 8', . . . which are disposed in a second row and at the bottom of the frame 4 where they rotate around vertical axes 1.sub.a. A vertical plane E.sub.1 in the longitudinal groove 13a of the first rail 13 is laterally offset with respect to plane E.sub.2 of the planar bearing surface.