Beam control method and apparatus
US5134298A · kind A · utility
14Cited by
9References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 1991 |
| Grant date | Jul 28, 1992 |
| Priority date | — |
| Expiry date | Mar 12, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3175
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A beam control method and apparatus for processing a specimen. A specimen is irradiated with a first beam capable of modifying a property of the specimen. Subsequently, a second beam, incapable of modifying a property of the specimen, irradiates the trace formed by the first beam to thereby identify the actual position of the trace by detecting a signal representing the actual position of the trace. On the basis of comparing actual position of the trace with a desired position of the trace, the latter is controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.