Patent · US Expired

Scanning tunneling microscope

US5138159A · kind A · utility

51Cited by
4References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 8, 1991
Grant dateAug 11, 1992
Priority date
Expiry dateJul 8, 2011

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/861
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

White light emitted from a light source is made incident on a spectroscope via a lens. The light from the spectroscope is converged by a lens and fed to one end of an optical fiber. The other end of the fiber is provided with a probe. The probe has a pointed end portion coated with a total reflection film and a transparent electrically conductive film. The probe is attached to a cylindrical piezoelectric actuator via a metal frame. Thus, the probe is scanned along the surface of a sample, and the distance between the probe and the surface of the sample is controlled. The light emitted from the tip of the probe and transmitted through the sample is converged by a lens system and radiated on a photoelectrical conversion element. The output from the photoelectrical conversion element is processed by a signal processor, and the processed result is displayed on a display. A driver circuit scans the probe along the surface of the sample, and controls the distance between the probe and the sample upon receiving a tunnel current. The output from the driver circuit is processed by the signal processor and an STM image is displayed on the display.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.