System for fabricating micro optical elements
US5148319A · kind A · utility
6Cited by
6References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 25, 1991 |
| Grant date | Sep 15, 1992 |
| Priority date | — |
| Expiry date | Feb 25, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A system for fabricating optical elements includes a source of optical radiation that provides an optical beam, the system includes an intensity controller in the path of the beam. The intensity controlled beam is directed toward a substrate disposed on a stage. The stage is adopted to be controllably translated in accordance with an optical intensity map.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.