Patent · US Expired

Wafer carrier holder for wafer carriers

US5149158A · kind A · utility

5Cited by
7References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 4, 1990
Grant dateSep 22, 1992
Priority date—
Expiry dateJun 4, 2010

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67326
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Low profile self-draining wafer carrier holder for gripping and carriage of semiconductor wafer carriers through robotically, automated or manual processing equipment. Opposing members extend horizontally from a central base with gripping fingers at outer extremities to grip wafer carriers for automatic processing. A handle member extends vertically from the central base member, and includes a handle member for accommodation by robotic end effectors. Beveled and angled surfaces in a preferred one-piece construction aid in accelerated fluid chemical runoff. An alternative embodiment includes a high temperature wafer carrier holder with a sloped handle and internal quartz structural rods to prevent warping of the holder.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.