Fabrication methods for micromechanical elements
US5149397A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 3, 1991 |
| Grant date | Sep 22, 1992 |
| Priority date | — |
| Expiry date | Jul 3, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A process in which concave surfaces to form undercut edges can be made and the application of such process to making micromechanical devices. Concave surfaces forming undercut edges are made in a wall of a stationary structure extending from a planar surface by growing a convex bumper into the wall. The bumper forms a convexo-concave relationship with the wall. The bumper is then removed from the wall in such a manner as to preserve the concave, undercut surface of the wall. The stationary structure and the planar surface is then further processed by coating with a sacrificial layer, and a structural layer. The structural layer is patterned into a movable structure that is held onto the stationary structure by the curved, undercut edge such as the slot in a slider. Final processing includes removing the sacrificial layer to free the movable structure from the stationary structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.