Method and apparatus for detecting patterns
US5153444A · kind A · utility
54Cited by
4References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 14, 1991 |
| Grant date | Oct 6, 1992 |
| Priority date | — |
| Expiry date | Jan 14, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for detecting a defect in a circuit pattern by detecting a gray image signal from each of a plurality of circuit patterns as objects of inspection, which circuit patterns have been fabricated so as to be identical with one another, and detecting a defect as a difference of edge position between two circuit patterns by comparing the detected gray image signal of one circuit pattern with the detected gray image signal of another circuit pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.