Takashi Hiroi
83Patents
20h-index
77Co-inventors
91Inventor score
Filing activity: Mar 1, 1985 → Oct 16, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5986263A | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 106 | Expired |
| US6172363A | Method and apparatus for inspecting integrated circuit pattern | Electricity | 96 | Expired |
| US6587581B1 | Visual inspection method and apparatus therefor | Electricity | 86 | Expired |
| US6107637A | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Electricity | 72 | Expired |
| US6329826A | Method and apparatus for inspecting integrated circuit pattern | Electricity | 56 | Expired |
| US6759655B2 | Inspection method, apparatus and system for circuit pattern | Electricity | 55 | Expired |
| US5153444A | Method and apparatus for detecting patterns | Physics | 54 | Expired |
| US5649022A | Pattern checking method and checking apparatus | Physics | 49 | Expired |
| US4772125A | Apparatus and method for inspecting soldered portions | Physics | 49 | Expired |
| US6388747B2 | Inspection method, apparatus and system for circuit pattern | Electricity | 43 | Expired |
| US5430548A | Method and apparatus for pattern detection | Physics | 40 | Expired |
| US6087673A | Method of inspecting pattern and apparatus thereof | Physics | 31 | Expired |
| US6172365A | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 30 | Expired |
| US6476913B1 | Inspection method, apparatus and system for circuit pattern | Electricity | 28 | Expired |
| US6347150B1 | Method and system for inspecting a pattern | Physics | 27 | Expired |
| US7692144B2 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Electricity | 27 | Active |
| US6421122B2 | Inspection method, apparatus and system for circuit pattern | Electricity | 27 | Expired |
| US6333510A | Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus | Electricity | 25 | Expired |
| US6335532B1 | Convergent charged particle beam apparatus and inspection method using same | Electricity | 22 | Expired |
| US6614923B1 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Electricity | 22 | Expired |
| US4641527A | Inspection method and apparatus for joint junction states | Physics | 20 | Expired |
| US6898305B2 | Circuit pattern inspection method and apparatus | Physics | 19 | Expired |
| US7116816B2 | Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen | Electricity | 19 | Expired |
| US6567168B2 | Inspection method, apparatus and system for circuit pattern | Electricity | 19 | Expired |
| US6493082B2 | Inspection method, apparatus and system for circuit pattern | Electricity | 18 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.