Crystal-etched matching faces on semiconductor chip and supporting semiconductor substrate
US5153700A · kind A · utility
4Cited by
3References
3Claims
0Family size
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Inventors
Key dates
| Filing date | Jan 22, 1991 |
| Grant date | Oct 6, 1992 |
| Priority date | — |
| Expiry date | Jan 22, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/15165
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Semiconductor chips are mounted in a supporting semiconductor substrate, with matching anisotropic (crystal plane) faces on the chips and substrate. The chips may extend above the substrate to facilitate connection together.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.