Temperature cycling ceramic electrostatic chuck
US5155652A · kind A · utility
103Cited by
14References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1991 |
| Grant date | Oct 13, 1992 |
| Priority date | — |
| Expiry date | May 2, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck 40 assembly includes, from top to bottom: a top isolation layer 42; an electrostatic pattern layer 44 comprised of an electrically conductive electrostatic pattern 46 disposed on a substrate 45; a heating layer 50 comprised of an electrically conductive heating pattern 54 disposed on a substrate 52; a support 60; and, a heat sink base 70 having backside cooling and insulating channels 78, 80 provided therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.