Robert E. Tompkins
19Patents
13h-index
10Co-inventors
71Inventor score
Filing activity: Jul 14, 1988 → Feb 27, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5191506A | Ceramic electrostatic chuck | Emerging Cross-Sectional Technologies | 108 | Expired |
| US5155652A | Temperature cycling ceramic electrostatic chuck | Emerging Cross-Sectional Technologies | 103 | Expired |
| US5055964A | Electrostatic chuck having tapered electrodes | Emerging Cross-Sectional Technologies | 99 | Expired |
| US5463525A | Guard ring electrostatic chuck | Emerging Cross-Sectional Technologies | 71 | Expired |
| US5561585A | Electrostatic chuck with reference electrode | Emerging Cross-Sectional Technologies | 66 | Expired |
| US5535507A | Method of making electrostatic chuck with oxide insulator | Emerging Cross-Sectional Technologies | 33 | Expired |
| US5099571A | Method for fabricating a split-ring electrostatic chuck | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5521790A | Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization | Emerging Cross-Sectional Technologies | 29 | Expired |
| US5467249A | Electrostatic chuck with reference electrode | Emerging Cross-Sectional Technologies | 26 | Expired |
| USRE37580E1 | Guard ring electrostatic chuck | General | 26 | Expired |
| US6268994A | Electrostatic chuck and method of manufacture | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6754062B2 | Hybrid ceramic electrostatic clamp | Electricity | 20 | Expired |
| US4845995A | Material tester | Physics | 15 | Expired |
| US5612851A | Guard ring electrostatic chuck | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6499987B1 | Positive control non-return valve for an injection molding machine | Emerging Cross-Sectional Technologies | 8 | Expired |
| US5901030A | Electrostatic chuck employing thermoelectric cooling | Emerging Cross-Sectional Technologies | 5 | Expired |
| US5925845A | Shoot-through cover for an explosively formed penetrator warhead | Mechanical Engineering; Lighting; Heating | 5 | Expired |
| US5905626A | Electrostatic chuck with ceramic pole protection | Emerging Cross-Sectional Technologies | 5 | Expired |
| USRE37541E1 | Electrostatic chuck with reference electrode | General | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.