Patent · US Expired

Aluminum nitride multi-chip module

US5155661A · kind A · utility

59Cited by
6References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 15, 1991
Grant dateOct 13, 1992
Priority date
Expiry dateMay 15, 2011

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A multi-chip module is configured using an aluminum nitride, or AlN, multi-chip substrate, sandwiched chip side down under an extruded aluminum convection cooled heat sink. An alignment ring includes grooves for control of z-axis elastomeric conductors slightly compressed between the chip connection surface of the substrate and the top surface of a PCB to provide the interconnections therebetween. The alignment ring includes a stopper portion which controls the height of the heat sink above the PCB as well as a smaller rail portion which controls the height of the substrate above the PCB. The good thermal conductivity, ruggedness and relatively good TCE match of the AlN substrate to the silicon chips permits a convenient, dense and thermally rugged MCM.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.