Laser safe housing for a particle monitor in vacuum pump lines
US5157678A · kind A · utility
3Cited by
3References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 3, 1991 |
| Grant date | Oct 20, 1992 |
| Priority date | — |
| Expiry date | Jul 3, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0231
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A housing for a laser based particle monitor comprising a pair of pipes for directing particle flow through a chamber. In one embodiment, elbows are disposed on the piping such that the interior of the chamber cannot be viewed from a point outside the housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.