Grid structure for reducing current density in focussed ion beam
US5159170A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 26, 1991 |
| Grant date | Oct 27, 1992 |
| Priority date | — |
| Expiry date | Apr 26, 2011 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K15/10
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A transmission grid is disposed in a conventional focussed ion beam system which includes an ion beam source emitter or ion gun, electrodes to turn the ion beam off and on, a beam defining aperture and electrostatic lenses to focus the ion beam onto a target. The elements of the ion beam system are disposed in a chamber which is provided with an inlet port and an outlet port. Gas is introduced into chamber via the inlet port where it is ionized by the ion beam into an ion plasma to be used to deposit materials onto the target. The transmission grid, is interposed which is a fine mesh, passive element is located in the path of the ion beam and reduces the ion beam current density by a desired value. The transmission grid may be configured with a variety of different transmissions so the current density can be adjusted in different increments depending on the gas/type of deposition to be performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.