Pneumatic energy fluxmeter
US5159267A · kind A · utility
83Cited by
5References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 2, 1992 |
| Grant date | Oct 27, 1992 |
| Priority date | — |
| Expiry date | Apr 2, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/0068
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fluxmeter which provides for a pneumatic apparatus for measuring an amount of plasma energy flux flowing into a semiconductor wafer provides for a non-electrical apparatus of measuring energy flux. A bulb has one end exposed to the plasma while the opposite end is supported by a heat sink. When plasma is applied, gas pressure in the bulb changes due to a change in temperature. This change in gas pressure is measured to provide a direct correlation to a value of energy flux impinging on the fluxmeter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.