Device and method for the alignment of masks
US5160959A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 1991 |
| Grant date | Nov 3, 1992 |
| Priority date | — |
| Expiry date | Dec 9, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device for aligning a flexible mask with a substrate when the substrate is mounted on a vacuum chuck member which includes a surround member surrounding the exposed surface of the substrate. The mask is held on a mask holder and the chuck member and mask holder are movable toward and away from each other. The surround member rests on a flexible element which effectively causes the surround member to float so that when the mask is brought into contact with the substrate, the mask always lies in the same plane as the exposed surface of the substrate and the exposed surface of the surround member and no distortion of the mask occurs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.