Substrate holding device
US5160961A · kind A · utility
15Cited by
6References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 1991 |
| Grant date | Nov 3, 1992 |
| Priority date | — |
| Expiry date | Mar 20, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for holding a substrate includes a holding system for holding a substrate by attraction and a guard system for preventing dropping of the substrate held by the holding system, the guard system being out of contact with the substrate as the same is held by the holding system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.