Mitsuji Marumo
13Patents
9h-index
19Co-inventors
69Inventor score
Filing activity: Mar 20, 1991 → Apr 18, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5231291A | Wafer table and exposure apparatus with the same | Physics | 90 | Expired |
| US5374829A | Vacuum chuck | Emerging Cross-Sectional Technologies | 84 | Expired |
| US5191218A | Vacuum chuck | Emerging Cross-Sectional Technologies | 80 | Expired |
| US5203547A | Vacuum attraction type substrate holding device | Electricity | 30 | Expired |
| US5883932A | Substrate holding device and exposing apparatus using the same | Emerging Cross-Sectional Technologies | 24 | Expired |
| US5160961A | Substrate holding device | Electricity | 15 | Expired |
| US5999589A | Substrate holding device and exposing apparatus using the same | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5586159A | Substrate holding system and exposure apparatus having the same | Physics | 10 | Expired |
| US5436693A | Substrate holding apparatus and a system using the same | Performing Operations; Transporting | 9 | Expired |
| US6800803B1 | Semiconductor manufacturing method and apparatus | Emerging Cross-Sectional Technologies | 4 | Expired |
| US5640440A | Substrate conveying system | Physics | 3 | Expired |
| US8441614B2 | Processing apparatus and device manufacturing method | Electricity | 1 | Active |
| US9123760B2 | Processing apparatus and device manufacturing method | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.