Speed enhancers for acid sensitized resists
US5164278A · kind A · utility
27Cited by
6References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 1990 |
| Grant date | Nov 17, 1992 |
| Priority date | — |
| Expiry date | Mar 1, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/119
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Acid sensitized photoresists with enhanced photospeed are provided. The photoresist compositions include a polymer binder and/or a polymerizable compound and an acid sensitive group which enables patterning of the resist composition, and acid generating photoinitiator, and an hydroxy aromatic compound which enhances the speed of the resist composition under imaging radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.