Patent · US Expired

Apparatus for the reactive coating of a substrate

US5169509A · kind A · utility

68Cited by

5References

5Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Rudolf Latz · Rodgau, DE
Michael Schanz · Gerlingen, DE
Michael Scherer · Crimmitschau, DE
Joachim Szczyrbowski · Goldbach, DE

Key dates

Filing date	May 9, 1991
Grant date	Dec 8, 1992
Priority date	—
Expiry date	May 9, 2011

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3429
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A pair of magnetron cathodes in an evacuable coating chamber are each connected to an ungrounded output of an A.C. power supply. The discharge voltage of at least one of the cathodes is measured and the flow of reactive gas into the chamber is controlled so that the measured voltage is identical to a desired voltage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.