Nanometer scale probe for an atomic force microscope, and method for making same
US5171992A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 3, 1991 |
| Grant date | Dec 15, 1992 |
| Priority date | — |
| Expiry date | Oct 3, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods are described for producing a needle probe tip having prescribed magnetic properties for a scanning magnetic force microscope (MFM) on a substrate positioned in an evacuated environment. A substantially rigid, nanometer-scale needle-like structure is produced by selective decomposition of a volatile organic compound by a highly focussed electron beam. Processing steps are described to obtain prescribed magnetic properties of such a needle probe structure; in particular, the fabrication of a single magnetic domain, with hard or soft magnetic properties at the distal end of the needle structure. Three dimensional probe tips are also achieved. These magnetic sensing probes allow magnetic imaging at the nanometer-scale level.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.