Surface treating agent for aluminum line pattern substrate
US5174816A · kind A · utility
45Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 1991 |
| Grant date | Dec 29, 1992 |
| Priority date | — |
| Expiry date | May 23, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32134
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A surface treating agent for an aluminum line pattern substrate is disclosed, comprising an aqueous solution containing 0.01 to 15% by weight of quaternary ammonium hydroxide represented by the general formula: ##STR1## wherein R is an alkyl group having 1 to 3 carbon atoms, or a hydroxy-substituted alkyl group having 1 to 3 carbon atoms, and R.sup.1, R.sup.2 and R.sup.3 are independently an alkyl group having 1 to 3 carbon atoms, and 0.1 to 20% by weight of sugar or sugar alcohol. This agent can inhibit the after-corrosion of aluminum effectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.