Liquid crystal display device with TFT's each including a Ta gate electrode and an anodized Al oxide film
US5177577A · kind A · utility
79Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 5, 1991 |
| Grant date | Jan 5, 1993 |
| Priority date | — |
| Expiry date | Jul 5, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13629
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An active matrix liquid crystal display device with a plurality of thin-film transistors each including a gate electrode of an upper aluminum film and a lower tantalum film formed over a glass substrate and a gate insulator of an upper silicon nitride film and a lower anodized oxide film of the aluminum film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.