Workpiece carrier with suction slot for a disk-shaped workpiece
US5180000A · kind A · utility
48Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1991 |
| Grant date | Jan 19, 1993 |
| Priority date | — |
| Expiry date | May 2, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
For the transmission of heat under vacuum conditions to a workpiece, a carrier is used with gas outlets and gas return openings distributed on its surface. A dynamic gas layer is thus formed between the carrier and the workpiece wherein the gas effects thermal conduction between the carrier and the workpiece. The gas outlets terminate in a distribution space implemented as a groove and has at least on slot shaped aperture extending substantially around most of the carrier periphery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.