Method for continuously deposting a transparent oxide material by chemical pyrolysis
US5180686A · kind A · utility
89Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1991 |
| Grant date | Jan 19, 1993 |
| Priority date | — |
| Expiry date | Oct 1, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1066
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of depositing a layer of doped or undoped wide band gap oxide material by chemical spray pyrolysis, upon a continuously advancing, elongated web of substrate material in a continuous, roll-to-roll process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.