Single diaphragm transducer with multiple sensing elements
US5184515A · kind A · utility
31Cited by
18References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1992 |
| Grant date | Feb 9, 1993 |
| Priority date | — |
| Expiry date | Jun 29, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0054
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements preferably comprises a plurality of piezoresistors each of which are coupled in a Wheatstone bridge configuration. This transducer achieves sensitive, accurate, high spatial resolution measurements of non-uniform pressures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.