High sensitivity, high resolution, solid state x-ray imaging device with barrier layer
US5187369A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 19, 1991 |
| Grant date | Feb 16, 1993 |
| Priority date | — |
| Expiry date | Sep 19, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/1898
Abstract
A radiation imager includes a photodetector array having topographically patterned surface features, which include support islands disposed over the active portion of one or more photodetectors in the photodetector array. A structured scintillator array having individual columnar scintillator elements is disposed in fixed relation to the photodetector array so that the individual scintillator elements are disposed on scintillator support islands. A barrier layer is disposed between the support islands and the photodetector array to minimize chemical interactions between the material forming the support island and the underlying photodetector array during the fabrication process. After the support islands have been patterned, the scintillator elements are grown by selectively depositing scintillator material on the support islands.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.