Differential displacement measuring interferometer
US5187543A · kind A · utility
52Cited by
4References
36Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 19, 1990 |
| Grant date | Feb 16, 1993 |
| Priority date | — |
| Expiry date | Jan 19, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A linear displacement interferometer system employs glass wedge prisms (71, 73, 75, 76) diposed about the interferometer axis of symmetry to refract the beams (51A, 55A) produced by the interferometer onto a single area (72, 86) approximately the size of the interferometer beam. If only one spot is produced on each of the stage and reference mirrors (72, 86), then any ambiguity concerning the beams (51B, 55B) is eliminated. In the preferred system, the stage (72) and standard (86) mirrors are located where the refracted beam crosses an interferometer axis of symmetry (80).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.