Integrated optical position measuring device and method with reference and measurement signals
US5187545A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1990 |
| Grant date | Feb 16, 1993 |
| Priority date | — |
| Expiry date | Dec 19, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A position measuring apparatus for measuring the position of an object having an integrated optical circuit on a substrate comprising a first grating for diffracting a light beam into a reference bundle and a measuring bundle. The first grating couples the reference bundle to an input of a coupler and decouples the measuring bundle from the substrate. The measuring bundle is directed to a reflecting element on the object wherein the measuring bundle is reflected from the object. The coupler has means for inputting signals and for outputting signals wherein the input signals are brought into interference. A second grating couples the reflected measuring bundle to another input of the coupler. Detection means detect the outputs of the coupler and generate phase displaced signals representative of the outputs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.