Interferometric measurement device with non stabilized light source
US5189489A · kind A · utility
10Cited by
1References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 14, 1991 |
| Grant date | Feb 23, 1993 |
| Priority date | — |
| Expiry date | May 14, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a method for greatly extending the effective coherence length of non-stabilized lasers allowing one to use them in interferometers with large optical path differences. The embodiment described as an example comprises a robust Twyman-Green interferometer for accurate measurement of extended displacements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.