Vacuum chuck
US5191218A · kind A · utility
80Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1991 |
| Grant date | Mar 2, 1993 |
| Priority date | — |
| Expiry date | Jun 28, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/11
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A vacuum-attraction holding device includes a holding base having an attracting surface, for holding a substrate thereon; a suction passageway formed in the base, for supplying a vacuum to the holding base to attract the substrate to the attracting surface; and a pressure sensor provided in the base and being communicated with the suction passageway.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.