Method of making a digital flexure beam accelerometer
US5192395A · kind A · utility
216Cited by
7References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 1990 |
| Grant date | Mar 9, 1993 |
| Priority date | — |
| Expiry date | Oct 12, 2010 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0235
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.