Robert Mark Boysel
28Patents
14h-index
15Co-inventors
78Inventor score
Filing activity: Oct 12, 1990 → Sep 4, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5551293A | Micro-machined accelerometer array with shield plane | Physics | 235 | Expired |
| US5526688A | Digital flexure beam accelerometer and method | Physics | 222 | Expired |
| US5192395A | Method of making a digital flexure beam accelerometer | Performing Operations; Transporting | 216 | Expired |
| US5305640A | Digital flexure beam accelerometer | Performing Operations; Transporting | 202 | Expired |
| US5661591A | Optical switch having an analog beam for steering light | Performing Operations; Transporting | 197 | Expired |
| US6061075A | Non-systolic time delay and integration printing | Electricity | 194 | Expired |
| US5629794A | Spatial light modulator having an analog beam for steering light | Physics | 137 | Expired |
| US5631782A | Support post architecture for micromechanical devices | Emerging Cross-Sectional Technologies | 92 | Expired |
| US5278925A | Integrated-optic waveguide devices and method | Physics | 61 | Expired |
| US5178728A | Integrated-optic waveguide devices and method | Physics | 56 | Expired |
| US5703728A | Support post architecture for micromechanical devices | Emerging Cross-Sectional Technologies | 47 | Expired |
| US5618759A | Methods of and apparatus for immobilizing semiconductor wafers during sawing thereof | Emerging Cross-Sectional Technologies | 46 | Expired |
| US5774252A | Membrane device with recessed electrodes and method of making | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5701372A | Hybrid architecture for integrated optic switchable time delay lines and method of fabricating same | Physics | 20 | Expired |
| US8593036B2 | High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same | Emerging Cross-Sectional Technologies | 13 | Active |
| US7684101B2 | Micro-electromechanical microshutter array | Performing Operations; Transporting | 11 | Active |
| US8077372B2 | Micro-electromechanical microshutter array | Performing Operations; Transporting | 9 | Active |
| US9309106B2 | 3D MEMS device and method of manufacturing | Electricity | 9 | Active |
| US6346776B1 | Field emission array (FEA) addressed deformable light valve modulator | Physics | 6 | Expired |
| US10407299B2 | 3D MEMS device with hermetic cavity | Performing Operations; Transporting | 4 | Active |
| US10768065B2 | MEMS pressure sensor | Performing Operations; Transporting | 4 | Active |
| US5721801A | Membrane optical waveguide device and method of fabrication | Electricity | 3 | Expired |
| US10214414B2 | Integrated MEMS system | Electricity | 3 | Active |
| US10273147B2 | MEMS components and method of wafer-level manufacturing thereof | Performing Operations; Transporting | 3 | Active |
| US11287486B2 | 3D MEMS magnetometer and associated methods | Performing Operations; Transporting | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.