Spin castable mixtures useful for making deep-UV contrast enhancement layers
US5196295A · kind A · utility
64Cited by
3References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 7, 1991 |
| Grant date | Mar 23, 1993 |
| Priority date | — |
| Expiry date | May 7, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/129
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Spin castable mixtures are provided which are useful for applying onto photoresist surfaces to produce a contrast enhancement layer employing .alpha.-alkyl-N-alkyl nitrones in combination with an inert organic binder and solvent. The .alpha.-alkyl-N-alkyl nitrones can be used with 200-300 nanometers UV light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.