Control system for a fine pattern printing apparatus
US5197118A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 1991 |
| Grant date | Mar 23, 1993 |
| Priority date | — |
| Expiry date | Sep 3, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70525
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system for controlling operation of a fine pattern printing apparatus. The system including a command storing portion in which a plurality of unit-operation instructing commands capable of instructing execution of corresponding unit operations which are components of the pattern printing operation of the apparatus and at least one sequential operation instructing command including a combination of at least a predetermined portion of the unit-operation instructing commands are stored. A command selecting portion for allowing selection of the commands stored in the command storing portion; a sequence setting portion cooperative with the command selecting portion so as to set, in the command storing portion, a desired sequential operation instructing command formed by a plurality of unit-operation instructing commands each of which is stored in the command storing portion. The sequential operation instructing command set in the storing portion by the sequence setting portion is selectable by the command selecting portion and operation controlling portion cooperative with the command selecting portion so as to control the operation of the apparatus in accordance with such one of the …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.