Inventor · Ayase, JP

Bunei Hamasaki

10Patents
8h-index
15Co-inventors
65Inventor score

Filing activity: Jun 27, 1985 → Jul 14, 1999

Most-cited inventions

PatentTitleAreaCited byStatus
US4677474A Wafer prober Electricity 54 Expired
US4937618A Alignment and exposure apparatus and method for manufacture of integrated circuits Physics 39 Expired
US4918320A Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment Physics 25 Expired
US5050111A Alignment and exposure apparatus and method for manufacture of integrated circuits Physics 24 Expired
US5365342A Alignment and exposure apparatus and method for manufacture of integrated circuits Electricity 21 Expired
US6499007B1 Parameter editing method and semiconductor exposure system Physics 17 Expired
US4801808A Alignment and exposure apparatus having an objective lens system capable of observing a mark on an exposure optical holding member to permit alignment of a mask relative to the exposure optical system Physics 13 Expired
US4811059A Alignment method Physics 11 Expired
US4881100A Alignment method Physics 4 Expired
US5197118A Control system for a fine pattern printing apparatus Physics 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.