PMN translator and linearization system in scanning probe microscope
US5200617A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1992 |
| Grant date | Apr 6, 1993 |
| Priority date | — |
| Expiry date | Aug 13, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer PMN translator arrangement including three PMN posts, with first ends of the PMN posts connected to the base. A first end of the inner piezoelectric tube is rigidly connected to second ends of the PMN posts. Inner quadrant conductors are disposed on the inner surfaces of the inner piezoelectric tube, and outer quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube. Separate x and y scan control voltage signals are applied to corresponding opposed quadrant conductors of the inner piezoelectric tube to control scanning of the free end of the inner tube in the x and y directions. A z scan control voltage is produced by a servo control circuit in response to a probe signal and applied to the PMN posts, which have negligible hysteresis. The servo control circuit refers to a look-up table to correct non-linearities of the PMN posts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.