Apparatus and method for testing integrated circuits
US5208531A · kind A · utility
14Cited by
9References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 13, 1990 |
| Grant date | May 4, 1993 |
| Priority date | — |
| Expiry date | Aug 13, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for testing an integrated circuit (12) generally comprises an input pad (14) and output pad (15) having photo-sensitive sensors (20, 46) formed thereon for eliminating the need to come into direct contact with a probe card for testing the integrity of an integrated circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.