Spin coating apparatus with an upper spin plate cleaning nozzle
US5209180A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 16, 1992 |
| Grant date | May 11, 1993 |
| Priority date | — |
| Expiry date | Mar 16, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A spin coating apparatus for use in applying a coating solution in film form to an upper surface of a substrate. This apparatus includes a spinning table for supporting and spinning the substrate in horizontal posture, an upper spinning plate disposed parallel to and substantially slightly spaced from the upper surface of the substrate supported on the spinning table, and having an opening formed substantially centrally thereof, the upper spinning plate being adapted to spin concurrently with the spinning table, and a cleaning nozzle vertically movably mounted in the opening of the upper spinning plate. The cleaning nozzle is lowered when cleaning a lower surface of the upper spinning plate, so that a cleaning liquid outlet port formed in a lower end region of the cleaning nozzle is exposed below the lower surface of the rotary plate. In this state, a cleaning liquid is directed to the lower surface of the upper spinning plate being spinng to clean the lower surface thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.