Patent · US Expired

Method of forming a precisely spaced stack of substrate layers

US5209798A · kind A · utility

13Cited by
19References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 22, 1991
Grant dateMay 11, 1993
Priority date
Expiry dateNov 22, 2011

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB65G49/069
  • WIPO fieldHandling
  • WIPO sectorMechanical engineering

Abstract

A precisely spaced stack of substrate layers comprises a plurality of substrate layers disposed one above another in a stacked configuration and having a glass layer coating on one of each pair of adjacent substrates, the glass layer having a thickness such that the sum of the thicknesses of the glass layer and the substrate to which the glass layer is fused is approximately equal for substantially all of the substrate layers. A polymer adhesive is disposed intermediate the glass layer and a substrate layer such that adjacent substrate layers are bonded together. By controlling the height of each pair of substrate and glass layers, a precisely spaced and strongly bonded stack of substrate layers is formed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.