Manufacture of a micromechanical element with two degrees of freedom
US5209818A · kind A · utility
4Cited by
3References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 3, 1991 |
| Grant date | May 11, 1993 |
| Priority date | — |
| Expiry date | Jul 3, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of fabricating a micromechanical structure of a rod enclosed by a casing and able to both slide and rotate in the casing is described. The rod is formed on a substrate by growing a cylinder into a wall. The wall is then removed leaving the cylinder. The cylinder is coated with a sacrificial layer and a structural layer. The structural layer is patterend to form the casing and the sacrificial layer is removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.