Bridge electrodes for microelectromechanical devices
US5216490A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 1990 |
| Grant date | Jun 1, 1993 |
| Priority date | — |
| Expiry date | Aug 3, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bridge electrode structure and method of fabrication thereof is provided that is adapted to provide electrically isolated metal bridges over the active portions of a monolithic micromechanical transducer. The bridge electrode of the invention is also adapted to operate in facing relationship with one or more buried electrodes, providing top-to-bottom symmetry for balanced application of forces, or motion detection when used in conjunction with transducer elements. The transducer, typically a gyroscope or an accelerometer, includes a semiconductor substrate and active elements etched out of the substrate, the active elements including flexure-supported transducer plates. The bridge electrodes are anchored at opposing points on the substrate's surface to metal layers used to facilitate their electro-forming. The central portions of the bridge are electroplated over an insulating spacer, such as a photoresist layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.