Apparatus for the evaporation of liquids

US5224202A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Manfred Arnold · Meckenbeuren, DE
• Rainer Gegenwart · Rödermark, DE
• Sonja Noll · Frankfurt, DE
• Jochen Ritter · Laubach, DE
• Helmut Stoll · Pocking, DE

Key dates

• Filing date: Sep 19, 1991
• Grant date: Jun 29, 1993
• Expiry date: Sep 19, 2011

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/4486
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A heated evaporator housing is provided at its inlet with an ultrasonic atomizer for reducing monomer to small droplets and a permeable porous body completely occupying a cross section of the housing between the inlet and the outlet. A vacuum pump and a reaction chamber for coating substrates are provided downstream of the outlet.