Storage vessel
US5226713A · kind A · utility
326Cited by
6References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 26, 1990 |
| Grant date | Jul 13, 1993 |
| Priority date | — |
| Expiry date | Dec 26, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A storage vessel maintaining clean environment for storing articles such as semiconductor wafers includes a plurality of receiver fixed to a shaft for horizontal rotation. The receivers support carriers having the articles therein. Both thrust and radial bearings supporting the shaft are of a non-contacting magnetic type. The shaft is driven by a motor with a rotor fixed to the shaft and a stator facing the rotor. The vessel may have a vacuum or be charged with inert gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.