Cluster tool dry cleaning system
US5228206A · kind A · utility
82Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 1992 |
| Grant date | Jul 20, 1993 |
| Priority date | — |
| Expiry date | Jan 15, 2012 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF26B21/14
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cluster tool module for dry process cleaning of substrates. A substrate process reactor body assembly includes a gas inlet and gas outlet on opposing sides of a ceramic reactor body. A linear xenon flash lamp in a light bar provides a UV source for uniform distribution over a substrate by use of a light filter. Infrared heating is also provided by a plurality of infrared lamps in the light box. A moisturizer is provided for safe introduction of water vapor into the gas flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.