Combination apparatus having a scanning electron microscope therein
US5229607A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 1991 |
| Grant date | Jul 20, 1993 |
| Priority date | — |
| Expiry date | Jun 12, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3056
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.