Fumikazu Itoh
20Patents
16h-index
48Co-inventors
77Inventor score
Filing activity: Aug 29, 1978 → Nov 8, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5055696A | Multilayered device micro etching method and system | Electricity | 96 | Expired |
| US5825035A | Processing method and apparatus using focused ion beam generating means | Electricity | 78 | Expired |
| US5656811A | Method for making specimen and apparatus thereof | Electricity | 75 | Expired |
| US4983540A | Method of manufacturing devices having superlattice structures | Emerging Cross-Sectional Technologies | 73 | Expired |
| US5683547A | Processing method and apparatus using focused energy beam | Electricity | 59 | Expired |
| US5504340A | Process method and apparatus using focused ion beam generating means | Electricity | 54 | Expired |
| US6753253B1 | Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams | Emerging Cross-Sectional Technologies | 45 | Expired |
| US5583344A | Process method and apparatus using focused ion beam generating means | Electricity | 43 | Expired |
| US5086015A | Method of etching a semiconductor device by an ion beam | Emerging Cross-Sectional Technologies | 42 | Expired |
| US5358806A | Phase shift mask, method of correcting the same and apparatus for carrying out the method | Electricity | 42 | Expired |
| US5223109A | Ion beam processing method and apparatus | Electricity | 35 | Expired |
| US5113072A | Device having superlattice structure, and method of and apparatus for manufacturing the same | Emerging Cross-Sectional Technologies | 31 | Expired |
| US5229607A | Combination apparatus having a scanning electron microscope therein | Electricity | 30 | Expired |
| US5447614A | Method of processing a sample using a charged beam and reactive gases and system employing the same | Electricity | 20 | Expired |
| US5026664A | Method of providing a semiconductor IC device with an additional conduction path | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5342448A | Apparatus for processing a sample using a charged beam and reactive gases | Electricity | 19 | Expired |
| US5439763A | Optical mask and method of correcting the same | Physics | 15 | Expired |
| US4449293A | Coil winding and inserting machine | Emerging Cross-Sectional Technologies | 8 | Expired |
| US4184644A | Winding machine | Electricity | 6 | Expired |
| US4299023A | Machine for winding and inserting coils | Emerging Cross-Sectional Technologies | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.