Patent · US Expired

Process and apparatus for the qualification of a capacitive system

US5233307A · kind A · utility

0Cited by

5References

6Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Alain Toffoli · Le Pont-de-Claix, FR
Jean-Luc Pelloie · Valbonne, FR

Key dates

Filing date	Mar 17, 1992
Grant date	Aug 3, 1993
Priority date	—
Expiry date	Mar 17, 2012

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2639
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

During a first period, the capacitive system to be qualified is polarized so as to be in the initial state (which can be accumulation or inversion in the case of a capacitive MIS semiconductor system). During a second period, the system is polarized so as to be in the depletion state with constant capacitance. As from a determined instant during the second period, the capacitive value of the system is recorded. This value serves as a reference for the servocontrol of the variation of the polarization voltage maintaining the capacitive system in the depletion state. The measurement of the servocontrol voltage makes it possible to obtain the desired qualification.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.