Method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity
US5234679A · kind A · utility
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1Claims
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Key dates
| Filing date | Apr 10, 1992 |
| Grant date | Aug 10, 1993 |
| Priority date | — |
| Expiry date | Apr 10, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01G41/04
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity includes the step of contacting the tungsten hexafluoride with at least one metal selected from the group consisting of Mo, W, Cu, Ni, Fe, Co, Zn, Ti, Al, Ca and Mg at a temperature ranging from 100.degree. to 500.degree. C. Molybdenum hexafluoride is efficiently removed from the tungsten hexafluoride by the method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.